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초미세 소자 기술 연구실

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연구실소개 (책임교수 : 황용하)

N/MEMS (Nano/Micro Electromechanical Systems) 기술은 반도체 공정 기술을 포함한 다양한 가공 기술을 이용하여 초소형의 새로운 기기를 개발하는 분야이다. 2016년에 신설된 초미세 소자 기술 연구실 (Miniaturized Devices & Technology Lab)은 마이크로/나노 영역의 센서 및 엑추에이터를 포함하는 다양한 소자 연구와 이를 구현하기 위한 공정 기술 개발에 주력하고 있으며, 제품의 소형화, 집적화, 저가격화를 통해 전자•기계 분야의 새로운 기회를 제공할 수 있는 흥미로운 연구를 위해 노력하고 있다.

연구분야

연구분야
  • COMSOL Multiphysics를 이용한 다양한 초미세 소자의 특성 시뮬레이션
  • 다공성 나노 입자를 집적한 마이크로 질량 센서
  • 3D 프린팅 기술을 활용한 다양한 생체적합 소프트 폴리머 소자 개발
  • 생명공학과 초미세 소자 공학의 인터페이스

연구업적

SCI Journal (2008 ~ )

  • [15] Y.H. Hwang, D.M. Seo, M. Roy, E. Han, R.N. Candler, and S.K. Seo, ‘Capillary flow in PDMS cylindrical microfluidic channel using 3D printed mold’, Journal of Microelectromechanical Systems, Vol.25, No.2, pp.238-240, Mar 31, 2016, DOI: 10.1109/JMEMS.2016.2521858..
  • [14] M. Roy, G.S. Jin, J.H. Pan, D.M. Seo, Y.H. Hwang, S.W. Oh, M. Lee, Y.J. Kim, and S.K. Seo, ‘Staining-free cell viability measurement technique using lens-free shadow imaging platform’, Sensors and Actuators B: Chemical, Vol.224, pp.577-583, Oct.30, 2015, DOI: 10.1016/j.snb.2015.10.097.
  • [13] Y.H. Hwang, O. Paydar, and R.N. Candler, “Pneumatic microfinger with balloon fins for linear motion using 3D printed molds,” Sensors and Actuators A: Physical, Vol.234, pp.65-71, Oct.1, 2015, DOI:10.1016/j.sna.2015.08.008.
  • [12] Y.H. Hwang, O. Paydar, and R.N. Candler, “3D printed molds for non-planar PDMS microfluidic channels,” Sensors and Actuators A: Physical, Vol.226, pp.137-142, May 1, 2015,DOI: 10.1016/j.sna.2015.02.028 .
  • [11] J. Harrison, Y.H. Hwang, O. Paydar, J. Wu, E. Threlkeld, J. Rosenzweig, P. Musumeci, and R. Candler, “High-gradient microelectromechanical system quadrupole electromagnets for particle beam focusing and steering,” Physical Review Special Topics-Accelerators and Beams, Vol.18, Issue 2, pp.023501-1, Feb.17, 2015, DOI: http://dx.doi.
  • [10] Y.H. Hwang, O.H. Paydar, M. Ho, J. B. Rosenzweig, and R.N. Candler, “Electrochemical macroporous silicon etching with current compensation,” Electronics Letters, Vol.50, No.19, pp.1373-1375, Sep.11, 2014, DOI: 10.1049/el.2014.1662.
  • [9] J. Harrison, O.Paydar, Y.H. Hwang, J. Wu, E. Threlkeld, P. Musumeci, and R.N. Candler, “Fabrication process for thick-film micromachined multi-pole electromagnets,” Journal of Microelectromechanical Systems, Vol.23, No.3, pp.505-507, May 29, 2014, DOI: 10.1109/JMEMS.2014.2315763.
  • [8] O.H. Paydar, C.N. Paredes, Y.H. Hwang, J. Paz, N.B. Shah, and R.N. Candler, “Characterization of 3D-printed microfluidic chip interconnects with integrated o-rings,” Sensors and Actuators A:Physical, Vol.205, pp.199-203, Jan.1, 2014, DOI: 10.1016/j.sna.2013.11.005.
  • [7] Y.H. Hwang, A. Phan, K. Galatsis, O.M. Yaghi, and R.N. Candler, “Zeolitic imidazolate framework-coupled resonators for enhanced gas detection,” Journal of Micromechanics and Microengineering, Vol.23, No.12, p.125027, Nov.14, 2013, DOI:10.1088/0960-1317/23/12/125027.
  • [6] Y.H. Hwang, H. Sohn, A. Phan, O.M. Yaghi, and R.N. Candler, “Dielectrophoresis-assembled zeolitic imidazolate framework nanoparticle-coupled resonators for highly sensitive and selective gas detection,” Nanoletters, Vol.13, Issue 11, pp.5271-5276, Oct.7, 2013, DOI: 10.1021/nl4027692.
  • [5] Y.H. Hwang, and Rob N. Candler, “Fabrication process for integrating nanoparticles with released structures using photoresist replacement of sublimated p-dichlorobenzene for temporary support,” Journal of Microelectromechanical Systems, Vol.21, No.6, pp.1282-1284, Nov.27, 2012, DOI: 10.1109/JMEMS.2012.2221160 .
  • [4] Y.H. Hwang, F. Gao, A.J. Hong, and R.N. Candler, “Porous silicon resonators for improved vapor detection,” Journal of Microelectromechanical Systems, Vol.21, No.1, pp.235-242, Feb.3, 2012, DOI: 10.1109/JMEMS.2011.2170819.
  • [3] S.M. Kim, E.B. Song, S. Seo, D.H. Seo, Y.H. Hwang, R. Candler, and K.L. Wang, “Suspended few-layer graphene beam electromechanical switch with abrupt on-off characteristics and minimal leakage current,” Applied Physics Letters, Vol.99, Issue 2, pp.023103, Jul.13, 2011, DOI: 10.1063/1.3610571.
  • [2] J.Y. Kim, A.J. Hong, S.M. Kim, K.S. Shin, E.B. Song, Y.H. Hwang, F. Xiu, K. Galatsis, C.O. Chui, R.N. Candler, S.Y. Choi, J.T. Moon, and K.L.Wang, “A stacked memory device on logic 3D technology for ultra high density data storage,” Nanotechnology, Vol.22, Issue 25, pp.254006-1, May 16, 2011, DOI: 10.1088/0957-4484/22/25/254006.
  • [1] Y.H. Hwang, S.O. Han, B.K. Lee, J.S. Kim, and J. Pak, "A two-step micromirror for low voltage operation," KIEE International Transactions on Electrophysics and Application, Vol.5-C, No.6, pp.270-275, Dec., 2005.
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